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The US Geological Survey said the quake struck at 20:46 local time (23:46 GMT) about 86km (52 miles) north-west of the mining area of Iquique.
Waves of up to 2.1m (6ft) have hit some areas in Chile, and there have been power cuts, fires and landslides.
Tens of thousands of people were evacuated in affected areas, where a state of emergency has been declared.
Chilean TV broadcast pictures of traffic jams as people tried to leave.
Officials said the dead included people who were crushed by collapsing walls or died of heart attacks.
Iquique Governor Gonzalo Prieto told local media that in addition to those killed, several people had been seriously injured.
While the government said it had no reports of significant damage to coastal areas, a number of adobe homes were reported destroyed in Arica.
http://www.bbc.com/news/world-latin-america-26846984
